5

Parylene-on-oil packaging for long-term implantable pressure sensors

Year:
2016
Language:
english
File:
PDF, 3.27 MB
english, 2016
16

A micro cell lysis device

Year:
1999
Language:
english
File:
PDF, 2.43 MB
english, 1999
17

Micromachined membrane particle filters

Year:
1999
Language:
english
File:
PDF, 2.81 MB
english, 1999
19

A biocompatible Parylene thermal flow sensing array

Year:
2008
Language:
english
File:
PDF, 1.65 MB
english, 2008
22

Parylene-based electret power generators

Year:
2008
Language:
english
File:
PDF, 1.44 MB
english, 2008
31

Lightly-doped polysilicon bridge as a flow meter

Year:
1988
Language:
english
File:
PDF, 1.01 MB
english, 1988
32

IC-processed electrostatic synchronous micromotors

Year:
1989
Language:
english
File:
PDF, 680 KB
english, 1989
33

IC-processed electrostatic micromotors

Year:
1989
Language:
english
File:
PDF, 712 KB
english, 1989
34

Integrated stylus-force gauge

Year:
1989
Language:
english
File:
PDF, 427 KB
english, 1989
35

On-chip temperature gradient interaction chromatography

Year:
2006
Language:
english
File:
PDF, 461 KB
english, 2006
36

A MEMS multi-sensor chip for gas flow sensing

Year:
2005
Language:
english
File:
PDF, 284 KB
english, 2005
42

MEMS flow sensors for nano-fluidic applications

Year:
2001
Language:
english
File:
PDF, 531 KB
english, 2001
45

A MEMS thermopneumatic silicone rubber membrane valve

Year:
1998
Language:
english
File:
PDF, 868 KB
english, 1998
47

A MEMS electrostatic particle transportation system

Year:
1999
Language:
english
File:
PDF, 1.72 MB
english, 1999